Sheet Resistance and Thin-Film Metrology

Non-contact eddy-current measurement

SES provides SWS-tec solutions for sheet resistance, resistivity and thin-film metrology. Non-contact eddy-current measurement helps avoid probe marks and supports repeatable measurements on delicate semiconductor and thin-film samples.

Applications include bulk wafer resistivity, conductive layers, process qualification, wafer mapping and cleanroom-compatible metrology workflows.