AOI Systems for Semiconductor Inspection

Automated optical inspection for R&D and production

SES supplies and supports Nanotronics nSpec AOI systems for defect detection, review, classification and process monitoring. Typical applications include semiconductor wafers, advanced packaging, compound semiconductors, MEMS, photonics and transparent or opaque substrates.

For configuration support, SES helps define optics, automation level, recipe structure, throughput targets and service concepts.